Concepedia

Kazuo Nojiri

KN

Statistics

Publications

8

Citations

346

H-Index

8

Active since

1987

Affiliations

Hitachi (Japan)(Current)

Lam Research (United States)

Kazuo Nojiri is an author at Hitachi (Japan) specializing in electronic materials, materials science, and etching processes.

Publications per year

1987–2017

8

Publications

8

Predicting synergy in atomic layer etching

Keren J. Kanarik, Samantha Tan, Wenbing Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 124 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

T. Ohba, Wenbing Yang, Samantha Tan et al. · Japanese Journal of Applied Physics · 2017 · 75 citations

Engineering, Materials Engineering, Materials Science +17

Anisotropic etching of RuO2 and Ru with high aspect ratio for gigabit dynamic random access memory

Takashi Yunogami, Kazuo Nojiri · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +16

Formation of deep holes in silicon by reactive ion etching

Kado Hirobe, Ko-ichirou Kawamura, Kazuo Nojiri · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +16

The Effect of Charge Build-up on Gate Oxide Breakdown during Dry Etching

Kazuyuki Tsunokuni, Kazuo Nojiri, Sumi KUBOSHIMA et al. · 1987 · 29 citations

Engineering, Electrical Engineering, Materials Science +16

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