Concepedia

Kazuyuki Tsunokuni

KT

Statistics

Publications

4

Citations

72

H-Index

4

Active since

1987

Affiliations

Hitachi (Japan)(Current)

Kazuyuki Tsunokuni is an author at Hitachi (Japan) specializing in electronic materials, engineering, and microelectronics.

Publications per year

1987–2004

4

Publications

4

The Effect of Charge Build-up on Gate Oxide Breakdown during Dry Etching

Kazuyuki Tsunokuni, Kazuo Nojiri, Sumi KUBOSHIMA et al. · 1987 · 29 citations

Engineering, Electrical Engineering, Materials Science +16

Study of gate oxide breakdown caused by charge buildup during dry etching

Kazuo Nojiri, Kazuyuki Tsunokuni · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 21 citations

Engineering, Electrical Engineering, Physics +17

An Advanced Defect-Monitoring Test Structure for Electrical Screening and Defect Localization

Y. Hamamura, Tetsuo KUMAZAWA, Kazuyuki Tsunokuni et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 12 citations

Natural Sciences, Electrical Engineering, Materials Science +14

High rate and highly selective anisotropic etching for WSi<i>x</i>/poly-Si using electron cyclotron resonance plasma

Kazuo Nojiri, Kazuyuki Tsunokuni, Kazuo Yamazaki · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 10 citations

Engineering, Materials Engineering, Materials Science +17

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