N. Sakudo

Microwave Plasma Etching

Keizô Suzuki, Sadayuki Okudaira, N. Sakudo et al. · Japanese Journal of Applied Physics · 1977 · 236 citations

Engineering, Materials Engineering, Physics +13

Microwave ion source

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1977 · 104 citations

Engineering, Electrical Engineering, Nuclear Engineering +15

Microwave ion source for high-current implanter

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1978 · 56 citations

Engineering, Electrical Engineering, Physics +15

Microwave ion source for ion implantation

N. Sakudo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 45 citations

Engineering, Electrical Engineering, Microwave Engineering +8

Surface modification of PET film by plasma-based ion implantation

N. Sakudo, D. Mizutani, Y. Ohmura et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 44 citations

Natural Sciences, Materials Science, Physics +15