Concepedia

K. Tokiguchi

KT

8

Publications

234

Citations

8

H-Index

1977

Active since

Affiliations

Hitachi (Japan)(Current)

K. Tokiguchi is an author at Hitachi (Japan) specializing in electrical engineering, engineering, and instrumentation.

Top concepts

Electrical EngineeringEngineeringInstrumentationEnergy HarvestingMicrowave EngineeringPulse PowerAntennaPhysicsCosmic RayApplied Physics

Publications per year

1977–1989

8

Publications

8

Microwave ion source

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1977 · 103 citations

Electrical Engineering, Engineering, High-current Ion Beams +11

Microwave ion source for high-current implanter

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1978 · 56 citations

Electrical Engineering, Energy Harvesting, Engineering +9

High-current ion implanter using a microwave ion source

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1983 · 20 citations

Transistor Current Gain, Electrical Engineering, Energy Harvesting +11

Microwave ion source for high current metal beams

N. Sakudo, K. Tokiguchi, H. Koike · Vacuum · 1984 · 13 citations

Electrical Engineering, Engineering, Applied Physics +2

New microwave ion source for high energy ion implanter

K. Amemiya, K. Tokiguchi, H. Koike et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 12 citations

Ion Implantation, Electrical Engineering, Energy Harvesting +2

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