New microwave ion source for high energy ion implanter

High energy ion implantation

J. F. Ziegler · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 144 citations

Natural Sciences, Physics, Plasma Physics +5

Review of the JINR Electron Beam Ion Sources

E. D. Donets · IEEE Transactions on Nuclear Science · 1976 · 66 citations

Natural Sciences, Nuclear Engineering, Physics +14

Microwave ion source for ion implantation

N. Sakudo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 45 citations

Engineering, Electrical Engineering, Microwave Engineering +8

MeV implantation for silicon device fabrication

Microelectronics Reliability · 1985 · 35 citations

Engineering, Electrical Engineering, Materials Engineering +11

Use of ECR ion sources at the AGRIPPA facility

M. Delaunay, S. Dousson, R. Geller et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 16 citations

Natural Sciences, Chemistry, Analytical Chemistry +7