Concepedia

MeV implantation for silicon device fabrication

Unknown author(s)

Microelectronics Reliability · 1985 · 35 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit FabricationIon ImplantationSilicon MaterialsDevice FabricationSiliconSilicon Device MaterialsSilicon Wafer Processing