Statistics
Publications
4
Citations
155
H-Index
4
Active since
1998
Affiliations
Renesas Electronics (Japan)(Current)
Kazumasa Yonekura is an author at Renesas Electronics (Japan) specializing in natural sciences, thin film etching, and materials science.
Publications per year
1998–2006
4
4
Investigation of ash damage to ultralow-k inorganic materials
Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 89 citations
Natural Sciences, Materials Engineering, Materials Science +17
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