Concepedia

Shigenori Sakamori

SS

8

Publications

226

Citations

8

H-Index

1992

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Renesas Electronics (Japan)

Tokyo Institute of Technology

Shigenori Sakamori is an author at Mitsubishi Electric (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsMaterials EngineeringElectrical EngineeringThin FilmsPulse PowerNanoelectronics

Publications per year

1992–2006

8

Publications

8

Investigation of ash damage to ultralow-k inorganic materials

Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 89 citations

Engineering, Ash Damage, Fly Ash +17

Structure of defects in silicon oxynitride films

S. Hasegawa, Shigenori Sakamori, M. Futatsudera et al. · Journal of Applied Physics · 2001 · 42 citations

Engineering, Optoelectronic Devices, Thin Film Process Technology +16

Epitaxial Growth of Metal(CoSi<sub>2</sub>)/Insulator(CaF<sub>2</sub>) Nanometer-Thick Layered Structure on Si(111)

M. Watanabe, Shigeki Muratake, Hiromasa Fujimoto et al. · Japanese Journal of Applied Physics · 1992 · 32 citations

Materials Science, Cosi 2, Epitaxial Growth +10

Evaluation of Electron Shading Charge Buildup Damage Using Metal-Nitride-Oxide-Silicon Capacitors

Shigenori Sakamori, Takahiro Maruyama, Nobuo Fujiwara et al. · Japanese Journal of Applied Physics · 1997 · 17 citations

Materials Engineering, Materials Science, Electrical Engineering +12

Effect of Electron Shading on Gate Oxide Degradation

Shigenori Sakamori, Takahiro Maruyama, Nobuo Fujiwara et al. · Japanese Journal of Applied Physics · 1998 · 13 citations

Electrical Engineering, Pulse Plasma, Engineering +15

Rows per page

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