M. Futatsudera is an author at Kanazawa University specializing in engineering, applied physics, and defect tolerance.
Top concepts
Thin FilmsEngineeringApplied PhysicsDefect ToleranceMaterial ScienceSemiconductorsSurface ScienceCrystalline DefectsElectronic MaterialsOptoelectronic Devices
Publications per year
2001–2003
2
2
Defects in silicon oxynitride films
M. Futatsudera, Taku Kimura Taku Kimura, Akira Matsumoto et al. · Thin Solid Films · 2003 · 12 citations
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