Taku Kimura Taku Kimura is an author at Kanazawa University specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsChemistryPhotonicsThin FilmsOptoelectronicsDefect ToleranceNatural Sciences
Publications per year
1998–2003
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Defects in silicon oxynitride films
M. Futatsudera, Taku Kimura Taku Kimura, Akira Matsumoto et al. · Thin Solid Films · 2003 · 12 citations
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