Concepedia

Kinya Goto

KG

Statistics

Publications

4

Citations

185

H-Index

4

Active since

1993

Affiliations

Renesas Electronics (Japan)(Current)

Kinya Goto is an author at Renesas Electronics (Japan) specializing in engineering, applied physics, and materials engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMaterials EngineeringChemistrySurface ScienceChemical EngineeringElectrical InsulationCorrosionThin Films

Publications per year

1993–2006

4

Publications

4

Investigation of ash damage to ultralow-k inorganic materials

Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 89 citations

Engineering, Ash Damage, Fly Ash +17

Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials

Kazumasa Yonekura, Kinya Goto, Masazumi Matsuura et al. · Japanese Journal of Applied Physics · 2005 · 43 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Fabrication of a Si<sub>1-x</sub>Ge<sub>x</sub> Channel Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) Containing High Ge Fraction Layer by Low-Pressure Chemical Vapor Deposition

Kinya Goto, Junichi Murota, Takahiro Maeda et al. · Japanese Journal of Applied Physics · 1993 · 42 citations

Materials Engineering, Semiconductor Technology, Electrical Engineering +14

Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands

Masazumi Matsuura, Kinya Goto, Noriko Miura et al. · MRS Proceedings · 2006 · 11 citations

Materials Science, Dielectrics, Engineering +9

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