Concepedia

Kinya Goto

KG

Statistics

Publications

4

Citations

185

H-Index

4

Active since

1993

Affiliations

Renesas Electronics (Japan)(Current)

Kinya Goto is an author at Renesas Electronics (Japan) specializing in materials science, materials engineering, and natural sciences.

Publications per year

1993–2006

4

Publications

4

Investigation of ash damage to ultralow-k inorganic materials

Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 89 citations

, , +17

Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials

Kazumasa Yonekura, Kinya Goto, Masazumi Matsuura et al. · Japanese Journal of Applied Physics · 2005 · 43 citations

, , +17

Fabrication of a Si<sub>1-x</sub>Ge<sub>x</sub> Channel Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) Containing High Ge Fraction Layer by Low-Pressure Chemical Vapor Deposition

Kinya Goto, Junichi Murota, Takahiro Maeda et al. · Japanese Journal of Applied Physics · 1993 · 42 citations

, , +17

Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands

Masazumi Matsuura, Kinya Goto, Noriko Miura et al. · MRS Proceedings · 2006 · 11 citations

, , +16

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