Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands - Concepedia

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Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands

11

Citations

2

References

2006

Year

Masazumi Matsuura, Kinya Goto, Noriko Miura, Shinobu Hashii, Koyu Asai

MRS Proceedings

Materials ScienceDielectricsEngineeringUv-vis SpectroscopyOptical PropertiesApplied PhysicsDifferent Wavelength BandsFilm CharacterizationElectrical PropertyOptoelectronicsThin Film ProcessingElectrical Insulation

References

	Year	Citations

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