Concepedia

Author

Masazumi Matsuura

Renesas Electronics (Japan)

Also Known As

Masazumi Matsuura

25

Publications

269

Citations

8

H-Index

24

Concepts

All Affiliations

Renesas Electronics (Japan)
MM

About

Masazumi Matsuura is an author at Renesas Electronics (Japan) specializing in materials science, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

215

2

Applied Physics

5

5

126

3

Chemistry

4

4

192

4

Chemical Engineering

3

3

173

5

Electrical Engineering

2

2

31

Masazumi Matsuura

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6

Publications

215

Citations

6

H-Index

YearCitations

Investigation of ash damage to ultralow-k inorganic materials

Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2004

89

Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials

Kazumasa Yonekura, Kinya Goto, Masazumi Matsuura,

Japanese Journal of Applied Physics

2005

43

Film Characteristics of APCVD Oxide Using Organic Silicon and Ozone

Masazumi Matsuura, Y. Hayashide, H. Kotani,

Japanese Journal of Applied Physics

1991

41

Local Bonding Structure of High-Stress Silicon Nitride Film Modified by UV Curing for Strained Silicon Technology beyond 45 nm Node SoC Devices

Yoshihiro Miyagawa, Tatsunori Murata, Y. Nishida,

Japanese Journal of Applied Physics

2007

19

Low-Temperature Silicon Oxide Offset Spacer Using Plasma-Enhanced Atomic Layer Deposition for High-k/Metal Gate Transistor

Tatsunori Murata, Yoshihiro Miyagawa, Y. Nishida,

Japanese Journal of Applied Physics

2010

12

Film Characterization of Ultra Low-k Dielectrics Modified by UV Curing with Different Wavelength Bands

Masazumi Matsuura, Kinya Goto, Noriko Miura,

MRS Proceedings

2006

11

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