Masazumi Matsuura

Investigation of ash damage to ultralow-k inorganic materials

Kazumasa Yonekura, Shigenori Sakamori, Kinya Goto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 89 citations

Engineering, Ash Damage, Fly Ash +17

Low-Damage Damascene Patterning Using Porous Inorganic Low-Dielectric-Constant Materials

Kazumasa Yonekura, Kinya Goto, Masazumi Matsuura et al. · Japanese Journal of Applied Physics · 2005 · 43 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Film Characteristics of APCVD Oxide Using Organic Silicon and Ozone

Masazumi Matsuura, Y. Hayashide, H. Kotani et al. · Japanese Journal of Applied Physics · 1991 · 41 citations

Materials Science, Chemical Engineering, Engineering +11

Local Bonding Structure of High-Stress Silicon Nitride Film Modified by UV Curing for Strained Silicon Technology beyond 45 nm Node SoC Devices

Yoshihiro Miyagawa, Tatsunori Murata, Y. Nishida et al. · Japanese Journal of Applied Physics · 2007 · 19 citations

Engineering, Tensile Stress, Vacuum Device +25

Low-Temperature Silicon Oxide Offset Spacer Using Plasma-Enhanced Atomic Layer Deposition for High-k/Metal Gate Transistor

Tatsunori Murata, Yoshihiro Miyagawa, Y. Nishida et al. · Japanese Journal of Applied Physics · 2010 · 12 citations

Engineering, Offset Spacer, Offset Spacer Films +20