9
Publications
191
Citations
9
H-Index
1975
Active since
Affiliations
H. Kotani is an author at Mitsubishi Electric (Japan) specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsMaterials EngineeringPhysicsSurface ScienceMicroelectronicsElectrical EngineeringSemiconductors
Publications per year
1975–2003
9
9
A highly reliable selective CVD-W utilizing SiH4 reduction for VLSI contacts
H. Kotani, T. Tsutsumi, J. Komori et al. · 1987 · 18 citations
Electrical Engineering, Wafer Scale Processing, Engineering +13
Rows per page
1–5 of 9