Junichi Murota

High-mobility strained-Si PMOSFET's

Deepak Kumar Nayak, Kenichi Gotō, Akira Yutani et al. · IEEE Transactions on Electron Devices · 1996 · 130 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Self-limited layer-by-layer etching of Si by alternated chlorine adsorption and Ar+ ion irradiation

Takashi Matsuura, Junichi Murota, Yasuji Sawada et al. · Applied Physics Letters · 1993 · 113 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature silicon selective deposition and epitaxy on silicon using the thermal decomposition of silane under ultraclean environment

Junichi Murota, Naoto Nakamura, Manabu Kato et al. · Applied Physics Letters · 1989 · 106 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Low-Temperature Epitaxial Growth of Si/Si_1-xGe_x/Si Heterostructure by Chemical Vapor Deposition

Junichi Murota, Shoichi Ono · Japanese Journal of Applied Physics · 1994 · 99 citations

Engineering, Materials Engineering, Materials Science +17

Atomically Controlled Processing for Group IV Semiconductors by Chemical Vapor Deposition

Junichi Murota, Masao Sakuraba, Bernd Tillack · Japanese Journal of Applied Physics · 2006 · 84 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17