Concepedia

Etch Selectivity

Etch Selectivity is the ratio of etch rates between two materials, serving as a metric that quantifies the relative removal rate of a target material compared to a second material under the same etching conditions, thereby distinguishing its efficacy in selectively patterning thin films while preserving underlying or adjacent layers in processes such as bulk micromachining and lithography.

445

Publications

15.1K

Citations

1.8K

Authors

353

Institutions

Publications per year

2017–2026

57

Variants

Etch Selectivity Ratio

Parents

Publications

445

Fabrication of single-crystal lithium niobate films by crystal ion slicing

M. Levy, Richard M. Osgood, R. Liu et al. · Applied Physics Letters · 1998 · 347 citations

, , +17

Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3

G. S. Oehrlein, Y. Zhang, D. Vender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 189 citations

, , +14

High rate and selective etching of GaN, AlGaN, and AlN using an inductively coupled plasma

S.A. Smith, Colin A. Wolden, M. D. Bremser et al. · Applied Physics Letters · 1997 · 175 citations

, , +17

The use of self-assembled monolayers and a selective etch to generate patterned gold features

Amit Kumar, Hans A. Biebuyck, Nicholas L. Abbott et al. · Journal of the American Chemical Society · 1992 · 169 citations

, , +17

Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs , Al0.3Ga0.7As , In0.2Ga0.8As , In0.53Ga0.47As , In0.52Al0.48As , and InP

G. DeSalvo, Wen Feng Tseng, J. Comas · Journal of The Electrochemical Society · 1992 · 168 citations

, , +17

1–5 of 445

Authors

1.8K

  1. SJ
    S. J. Pearton

    University of Florida, United States

    11 publications · 466 citations

    11

    h-index

  2. GY
    Geun Young Yeom

    Sungkyunkwan University, South Korea

    9 publications · 167 citations

    9

    h-index

  3. NL
    Nae‐Eung Lee

    Sungkyunkwan University, South Korea

    8 publications · 169 citations

    8

    h-index

  4. GY
    G.Y. Yeom

    Sungkyunkwan University, South Korea

    8 publications · 189 citations

    8

    h-index

  5. GS
    G. S. Oehrlein

    University of Maryland, College Park, United States

    7 publications · 635 citations

    7

    h-index

1–5 of 1.8K

Institutions

353

  1. Sungkyunkwan University

    Seoul, South Korea

    16 h-index

    128 publications

    2.6K citations

  2. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    15 h-index

    51 publications

    2.3K citations

  3. Commissariat à l'Énergie Atomique et aux Énergies Alternatives

    Paris, France

    13 h-index

    52 publications

    1.3K citations

  4. CEA Grenoble

    Grenoble, France

    12 h-index

    43 publications

    1.1K citations

  5. Sandia National Laboratories

    Albuquerque, United States

    11 h-index

    24 publications

    781 citations

  6. Samsung (South Korea)

    Seoul, South Korea

    11 h-index

    39 publications

    1.3K citations

  7. Laboratoire d'Électronique des Technologies de l'Information

    Grenoble, France

    10 h-index

    38 publications

    863 citations

  8. AT&T (United States)

    Bedminster, United States

    10 h-index

    39 publications

    727 citations

1–8 of 353

Venues

  1. 27

    h-index

  2. Journal of The Electrochemical Society

    JES · 55 publications · 1.8K citations

    26

    h-index

  3. 25

    h-index

  4. Applied Physics Letters

    35 publications · 1.7K citations

    23

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 33 publications · 1K citations

    18

    h-index

1–5