S.A. Smith - Concepedia

Author

S.A. Smith

Also Known As

S. A. Smith, S. Smith, S.A. Smith, SA Smith

Publications

212

Citations

H-Index

Concepts

All Affiliations

S.A. Smith is an author at North Carolina State University specializing in electrical engineering, nanoelectronics, and optoelectronics.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	195
2	Applied Physics	2	2	195
3	Electrical Engineering	2	2	195
4	Materials Science	2	2	195
5	Materials Engineering	1	1	174

S.A. Smith

Publications

195

Citations

H-Index

Page 1

	Year	Citations
High rate and selective etching of GaN, AlGaN, and AlN using an inductively coupled plasma S.A. Smith, Colin A. Wolden, M. D. Bremser, Applied Physics Letters Aluminium NitrideSelective EtchingEngineeringAluminum NitrideHigh Rate	1997	174
Selective etching of GaN over AlN using an inductively coupled plasma and an O2/Cl2/Ar chemistry S.A. Smith, W. V. Lampert, P. Rajagopal, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceAluminium NitrideElectrical EngineeringSelective EtchingEngineering	2000	21

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