Concepedia

S.A. Smith

SS

2

Publications

195

Citations

2

H-Index

1997

Active since

Affiliations

North Carolina State University(Current)

Wright-Patterson Air Force Base

S.A. Smith is an author at North Carolina State University specializing in electrical engineering, nanoelectronics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsNanoelectronicsOptoelectronicsSurface ScienceMaterial ScienceElectrical EngineeringPhysicsMicroelectronicsMaterials Engineering

Publications per year

1997–2000

2

Publications

2

High rate and selective etching of GaN, AlGaN, and AlN using an inductively coupled plasma

S.A. Smith, Colin A. Wolden, M. D. Bremser et al. · Applied Physics Letters · 1997 · 174 citations

Aluminium Nitride, Selective Etching, Engineering +16

Selective etching of GaN over AlN using an inductively coupled plasma and an O2/Cl2/Ar chemistry

S.A. Smith, W. V. Lampert, P. Rajagopal et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 21 citations

Materials Science, Aluminium Nitride, Electrical Engineering +14

Rows per page

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