Concepedia

M. de Boer

MD

Statistics

Publications

25

Citations

2.2K

H-Index

20

Active since

1995

Affiliations

University of Twente(Current)

Delft University of Technology

Eindhoven University of Technology

Dutch Institute for Fundamental Energy Research

Maastricht University

M. de Boer is an author at University of Twente specializing in engineering, microfabrication, and etching processes.

Publications per year

1995–2020

25

Publications

25

The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Henri Jansen, M. de Boer, R. Legtenberg · Journal of Micromechanics and Microengineering · 1995 · 593 citations · Full text

Engineering, Materials Engineering, Materials Science +17

A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, M. de Boer et al. · Journal of Micromechanics and Microengineering · 1996 · 473 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures

R. Legtenberg, Henri Jansen, M. de Boer · Journal of The Electrochemical Society · 1995 · 161 citations · Full text

Engineering, Materials Engineering, Materials Science +14

The black silicon method II:The effect of mask material and loading on the reactive ion etching of deep silicon trenches

Henri Jansen, M. de Boer, Johannes Faas Burger et al. · Microelectronic Engineering · 1995 · 150 citations · Full text

Engineering, Materials Engineering, Materials Science +15

BSM 7: RIE lag in high aspect ratio trench etching of silicon

Henri Jansen, M. de Boer, Remco J. Wiegerink et al. · Microelectronic Engineering · 1997 · 144 citations · Full text

Engineering, Electrical Engineering, Materials Science +11

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