M. de Boer - Concepedia

Concepedia

Author

M. de Boer

University of Twente

Also Known As

De Boer, Meint, M de Boer, M. De Boer, M. de Boer, Meint Boer, Meint De Boer, Meint de Boer

43

Publications

2.2K

Citations

20

H-Index

60

Concepts

All Affiliations

University of Twente Delft University of Technology Eindhoven University of Technology Dutch Institute for Fundamental Energy Research Maastricht University

MD

About

M. de Boer is an author at University of Twente specializing in engineering, applied physics, and microelectronics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	12	15	1.1K
2	Applied Physics	10	10	944
3	Medicine	3	3	170
4	Health Sciences	1	1	11
5	Natural Sciences	1	1	12

M. de Boer

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25

Publications

2.2K

Citations

20

H-Index

	Year	Citations
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control Henri Jansen, M. de Boer, R. Legtenberg, Journal of Micromechanics and Microengineering	1995	587
A survey on the reactive ion etching of silicon in microtechnology Henri Jansen, Han Gardeniers, M. de Boer, Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringReactive Ion EtchingSilicon On InsulatorPlasma Processing	1996	464
Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures R. Legtenberg, Henri Jansen, M. de Boer, Journal of The Electrochemical Society	1995	159
The black silicon method II:The effect of mask material and loading on the reactive ion etching of deep silicon trenches Henri Jansen, M. de Boer, Johannes Faas Burger, Microelectronic Engineering Electrical EngineeringIon ImplantationEngineeringDeep Silicon TrenchesMicrofabrication	1995	146
BSM 7: RIE lag in high aspect ratio trench etching of silicon Henri Jansen, M. de Boer, Remco J. Wiegerink, Microelectronic Engineering Materials EngineeringEngineeringPhysicsNanoelectronicsBias Temperature Instability	1997	143
The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source Henri Jansen, M. de Boer, H. Wensink, Microelectronics Journal	2001	91
Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration Frits Hulshof, Bernke J. Papenburg, Aliaksei Vasilevich, Biomaterials MechanobiologyTissue EngineeringBone ImagingEngineeringOsteogenic Surface Topographies	2017	78
The black silicon method. VI. High aspect ratio trench etching for MEMS applications Henri Jansen, M. de Boer, M. Elwenspoek EngineeringRatio TrenchSilicon On InsulatorWafer Scale ProcessingAdvanced Packaging (Semiconductors)	2002	55
NanoTopoChip: High-throughput nanotopographical cell instruction Frits Hulshof, Yiping Zhao, Aliaksei Vasilevich, Acta Biomaterialia MicroscopyNanocomputingCell ManipulationMedicineBiophysics	2017	49
Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography Yiping Zhao, Erwin Berenschot, M. de Boer, Journal of Micromechanics and Microengineering	2008	43

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