R. Legtenberg

The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Henri Jansen, M. de Boer, R. Legtenberg · Journal of Micromechanics and Microengineering · 1995 · 593 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Comb-drive actuators for large displacements

R. Legtenberg, A.W. Groeneveld · Journal of Micromechanics and Microengineering · 1996 · 584 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +13

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 409 citations · Full text

Engineering, Electrical Engineering, Materials Science +12

Electrostatic curved electrode actuators

R. Legtenberg, James Gilbert, S.D. Senturia et al. · Journal of Microelectromechanical Systems · 1997 · 247 citations · Full text

Engineering, Electrical Engineering, Actuators +8