R. Legtenberg

The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Henri Jansen, M. de Boer, R. Legtenberg et al. · Journal of Micromechanics and Microengineering · 1995 · 587 citations

Comb-drive actuators for large displacements

R. Legtenberg, A.W. Groeneveld, M. Elwenspoek · Journal of Micromechanics and Microengineering · 1996 · 576 citations

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 542 citations

Engineering, Mechanical Engineering, Large Adhesion Forces +16

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 408 citations · Full text

Vacuum-encapsulated Polysilicon Resonators, Electrical Engineering, Engineering +4

Electrostatic curved electrode actuators

R. Legtenberg, James Gilbert, S.D. Senturia et al. · Journal of Microelectromechanical Systems · 1997 · 247 citations

Electrical Engineering, Engineering, Soft Robotics +15