T. Sonnenberg is an author at University of Twente specializing in microfabrication, mechanical engineering, and engineering.
Top concepts
EngineeringMicrofabricationMechanical EngineeringActuatorsMechanicsKinematicsKinesiologySoft MatterMechatronicsMicrofluidics
Publications per year
1996–2002
2
2
Stiction in surface micromachining
Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 542 citations
Engineering, Mechanical Engineering, Large Adhesion Forces +16
Niels R. Tas, T. Sonnenberg, Robert Molenaar et al. · Journal of Micromechanics and Microengineering · 2002 · 16 citations
Engineering, Mechanical Engineering, Electrostatic Motors +20
Rows per page
1–2 of 2