H.A.C. Tilmans - Concepedia

Author

H.A.C. Tilmans

Also Known As

Charu Bai Reddy, H A C Tilmans, H. A. C. Tilmans, H. A.C. Tilmans, H. Tilmans, H.A.C Tilmans, H.A.C. Tilmans, Harrie A C Tilmans, Harrie A. C. Tilmans, Harrie A. Tilmans

253

Publications

5.5K

Citations

H-Index

109

Concepts

All Affiliations

IMEC KU Leuven University of Twente Philips (Netherlands)

About

H.A.C. Tilmans is an author at IMEC specializing in engineering, electrical engineering, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	32	69	4.5K
2	Applied Physics	16	18	1.4K
3	Computer Engineering	10	10	243
4	Education	2	2	62
5	Biomedical Engineering	2	2	105

H.A.C. Tilmans

Publications

Citations

H-Index

Page 1

	Year	Citations
Electrostatically driven vacuum-encapsulated polysilicon resonators H.A.C. Tilmans, R. Legtenberg Sensors and Actuators A Physical Vacuum-encapsulated Polysilicon ResonatorsElectrical EngineeringEngineeringMicrofabricationApplied Physics	1994	408
Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions Sayanu Pamidighantam, Robert Puers, Kris Baert, Journal of Micromechanics and Microengineering Electrical EngineeringEngineeringMechanicsMechanical EngineeringClosed-form Expression	2002	366
Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems H.A.C. Tilmans Journal of Micromechanics and Microengineering Electrical EngineeringEngineeringDynamic Electromechanical BehaviourMechanical EngineeringMechatronics	1996	347
Micro resonant force gauges H.A.C. Tilmans, M. Elwenspoek, J.H.J. Fluitman Sensors and Actuators A Physical PhysicsMicrofabricationNano Electro Mechanical SystemInstrumentationMicro-electromechanical System	1992	274
MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP H.A.C. Tilmans, W. De Raedt, Eric Beyne Journal of Micromechanics and Microengineering Wireless CommunicationsElectrical EngineeringMicrowave CircuitsEngineeringRadio Frequency	2003	236
Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication R. Legtenberg, H.A.C. Tilmans Sensors and Actuators A Physical Materials ScienceElectrical EngineeringEngineeringMicrofabricationApplied Physics	1994	214
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms R. Legtenberg, H.A.C. Tilmans, J. Elders, Sensors and Actuators A Physical Materials ScienceEngineeringMicromachinesMicromechanicsMicrofabrication	1994	202
Fine-grained polysilicon films with built-in tensile strain H. Guckel, D.W. Burns, C.C.G. Visser, IEEE Transactions on Electron Devices EngineeringSevere Plastic DeformationMicromechanicsMechanical EngineeringMechanics Modeling	1988	157
Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes Xavier Rottenberg, Ingrid De Wolf, Bart Nauwelaers, Journal of Microelectromechanical Systems Electrical EngineeringMems DevicesEngineeringElectrostatic ActuationMicrofabrication	2007	144
Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems H.A.C. Tilmans Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringPiezoelectric Acceleration SensorSoft RoboticsSystems Engineering	1997	142

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