H.A.C. Tilmans

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 409 citations · Full text

Engineering, Electrical Engineering, Materials Science +12

Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions

Sayanu Pamidighantam, Robert Puers, Kris Baert et al. · Journal of Micromechanics and Microengineering · 2002 · 368 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems

H.A.C. Tilmans · Journal of Micromechanics and Microengineering · 1996 · 352 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Micro resonant force gauges

H.A.C. Tilmans, J.H.J. Fluitman · Sensors and Actuators A Physical · 1992 · 274 citations · Full text

Engineering, Electrical Engineering, Physics +12

MEMS for wireless communications:  from RF-MEMS components to RF-MEMS-SiP 

H.A.C. Tilmans, W. De Raedt, Eric Beyne · Journal of Micromechanics and Microengineering · 2003 · 236 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16