H.A.C. Tilmans

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 408 citations · Full text

Vacuum-encapsulated Polysilicon Resonators, Electrical Engineering, Engineering +4

Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions

Sayanu Pamidighantam, Robert Puers, Kris Baert et al. · Journal of Micromechanics and Microengineering · 2002 · 366 citations

Electrical Engineering, Engineering, Mechanics +9

Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems

H.A.C. Tilmans · Journal of Micromechanics and Microengineering · 1996 · 347 citations

Electrical Engineering, Engineering, Dynamic Electromechanical Behaviour +14

Micro resonant force gauges

H.A.C. Tilmans, M. Elwenspoek, J.H.J. Fluitman · Sensors and Actuators A Physical · 1992 · 274 citations · Full text

Physics, Microfabrication, Nano Electro Mechanical System +2

MEMS for wireless communications:  from RF-MEMS components to RF-MEMS-SiP 

H.A.C. Tilmans, W. De Raedt, Eric Beyne · Journal of Micromechanics and Microengineering · 2003 · 236 citations

Wireless Communications, Electrical Engineering, Microwave Circuits +15