J.H.J. Fluitman

A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, M. de Boer et al. · Journal of Micromechanics and Microengineering · 1996 · 473 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol, H.T.G. van Lintel, J.H.J. Fluitman · Sensors and Actuators A Physical · 1990 · 280 citations · Full text

Engineering, Bioengineering, Mechanical Engineering +13

Micro resonant force gauges

H.A.C. Tilmans, J.H.J. Fluitman · Sensors and Actuators A Physical · 1992 · 274 citations · Full text

Engineering, Electrical Engineering, Physics +12

Micro-liquid flow sensor

Theo Lammerink, Niels R. Tas, J.H.J. Fluitman · Sensors and Actuators A Physical · 1993 · 201 citations · Full text