J.H.J. Fluitman

A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, M. de Boer et al. · Journal of Micromechanics and Microengineering · 1996 · 464 citations · Full text

Engineering, Mechanical Engineering, Reactive Ion Etching +18

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 443 citations · Full text

Engineering, Structural Dynamics, Mechanical Engineering +16

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol, H.T.G. van Lintel, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1990 · 279 citations · Full text

Engineering, Soft Robotics, Micromachines +8

Micro resonant force gauges

H.A.C. Tilmans, M. Elwenspoek, J.H.J. Fluitman · Sensors and Actuators A Physical · 1992 · 274 citations · Full text

Physics, Microfabrication, Nano Electro Mechanical System +2

Micro-liquid flow sensor

Theo Lammerink, Niels R. Tas, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1993 · 199 citations · Full text

Engineering, Sensors, Microfabrication +5