Micro resonant force gauges

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

The resonant gate transistor

H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations

Engineering, Electrical Engineering, Microelectronics +11

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Fabrication of novel three-dimensional microstructures by the anisotropic etching of

E. Bassous · IEEE Transactions on Electron Devices · 1978 · 311 citations

Engineering, Materials Engineering, Materials Science +15