Concepedia

K.E. Bean

KB

13

Publications

1.2K

Citations

11

H-Index

1967

Active since

Affiliations

Texas Instruments (United States)(Current)

North Carolina State University

K.E. Bean is an author at Texas Instruments (United States) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsSurface ScienceElectrical EngineeringIntegrated CircuitsMaterials EngineeringCrystalline DefectsElectrical Insulation

Publications per year

1967–1989

13

Publications

13

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 792 citations

Materials Science, Wafer Scale Processing, Orientation Silicon +12

Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System

K.E. Bean, P. S. Gleim, Richard Yeakley et al. · Journal of The Electrochemical Society · 1967 · 96 citations

Materials Science, High Temperature Materials, Engineering +15

Dielectric Isolation: Comprehensive, Current and Future

K.E. Bean, W. R. Runyan · Journal of The Electrochemical Society · 1977 · 71 citations · Full text

Dielectrics, Engineering, Integrated Circuits +16

The influence of crystal orientation on silicon semiconductor processing

K.E. Bean, P. S. Gleim · Proceedings of the IEEE · 1969 · 50 citations

Materials Science, Materials Engineering, Electrical Engineering +13

Defect engineering for VLSI epitaxial silicon

G. A. Rozgonyi, Ali Salih, Z. J. Radzimski et al. · Journal of Crystal Growth · 1987 · 27 citations

Engineering, Defect Engineering, Applied Physics +5

Rows per page

1–5 of 13