K.E. Bean - Concepedia

Author

K.E. Bean

Texas Instruments (United States)

Also Known As

K. Bean, K. E. Bean, K.E. Bean, Kenneth E. Bean

Publications

1.4K

Citations

H-Index

Concepts

All Affiliations

Texas Instruments (United States)North Carolina State University

About

K.E. Bean is an author at Texas Instruments (United States) specializing in applied physics, engineering, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	12	1.2K
2	Applied Physics	11	11	1.1K
3	Electrical Engineering	5	5	160
4	Materials Engineering	4	4	105
5	Chemical Engineering	1	1	18

K.E. Bean

Publications

1.2K

Citations

H-Index

Page 1

	Year	Citations
Anisotropic etching of silicon K.E. Bean IEEE Transactions on Electron Devices Materials ScienceWafer Scale ProcessingOrientation SiliconEngineeringMicrofabrication	1978	792
Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System K.E. Bean, P. S. Gleim, Richard Yeakley, Journal of The Electrochemical Society Materials ScienceHigh Temperature MaterialsEngineeringCrystalline DefectsGrowth Rate	1967	96
Dielectric Isolation: Comprehensive, Current and Future K.E. Bean, W. R. Runyan Journal of The Electrochemical Society DielectricsEngineeringIntegrated CircuitsInterconnect (Integrated Circuits)Electromagnetic Compatibility	1977	71
The influence of crystal orientation on silicon semiconductor processing K.E. Bean, P. S. Gleim Proceedings of the IEEE Materials ScienceMaterials EngineeringElectrical EngineeringStable Crystal GrowthEngineering	1969	50
Defect engineering for VLSI epitaxial silicon G. A. Rozgonyi, Ali Salih, Z. J. Radzimski, Journal of Crystal Growth EngineeringDefect EngineeringApplied PhysicsVlsiSilicon On Insulator	1987	27
Transition metal silicide precipitation in silicon induced by rapid thermal processing and free-surface gettering R. R. Kola, G. A. Rozgonyi, J. Li, Applied Physics Letters EngineeringIntegrated CircuitsSilicon On InsulatorWafer Scale ProcessingSilicene	1989	25
Chemical vapor deposition applications in microelectronics processing K.E. Bean Thin Solid Films Materials ScienceEngineeringMicrofabricationChemical DepositionMicroelectronics	1981	21
Thermal and Electrical Anisotropy of Polycrystalline Silicon K.E. Bean, H. P. Hentzschel, D. Colman Journal of Applied Physics Materials ScienceEngineeringApplied PhysicsElectrical AnisotropyAmorphous Solid	1969	21
Some Properties of Vapor Deposited SiC K.E. Bean, P. S. Gleim Journal of The Electrochemical Society Materials EngineeringMaterials ScienceChemical EngineeringElectronic DevicesElectrical Resistance	1967	18
Gated diode leakage and lifetime measurements of misfit dislocation gettered Si epitaxy Ali Salih, Z. J. Radzimski, J. W. Honeycutt, Applied Physics Letters Electrical EngineeringEngineeringDislocation InteractionNanoelectronicsMisfit Dislocation	1987	16

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