Concepedia

Richard Yeakley

RY

Statistics

Publications

3

Citations

205

H-Index

3

Active since

1967

Affiliations

Texas Instruments (United States)(Current)

Richard Yeakley is an author at Texas Instruments (United States) specializing in chemical vapor deposition, engineering, and materials engineering.

Publications per year

1967–1992

3

Publications

3

Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System

K.E. Bean, P. S. Gleim, Richard Yeakley et al. · Journal of The Electrochemical Society · 1967 · 96 citations

, , +17

Single-wafer integrated semiconductor device processing

Masoud Moslehi, R. A. Chapman, Man Wong et al. · IEEE Transactions on Electron Devices · 1992 · 96 citations

, , +17

<i>In-Situ</i> Fabrication and Process Control Techniques in Rapid Thermal Processing

Mehrdad M. Moslehi, John Kuehne, Richard Yeakley et al. · MRS Proceedings · 1991 · 13 citations

, , +16

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