3
Publications
205
Citations
3
H-Index
1967
Active since
Affiliations
Texas Instruments (United States)(Current)
Richard Yeakley is an author at Texas Instruments (United States) specializing in engineering, device architecture, and micromanufacturing.
Top concepts
EngineeringThin FilmsApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMicromanufacturingCrystalline DefectsDevice Architecture
Publications per year
1967–1992
3
3
<i>In-Situ</i> Fabrication and Process Control Techniques in Rapid Thermal Processing
Mehrdad M. Moslehi, John Kuehne, Richard Yeakley et al. · MRS Proceedings · 1991 · 13 citations
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