Masoud Moslehi

Thermal nitridation of Si and SiO₂for VLSI

Masoud Moslehi, Krishna C. Saraswat · IEEE Transactions on Electron Devices · 1985 · 172 citations

Materials Science, Metal-insulator Semiconductor, Chemical Engineering +13

Kinetics of thermal nitridation processes in the study of dopant diffusion mechanisms in silicon

P. Fahey, G.P. Barbuscia, Masoud Moslehi et al. · Applied Physics Letters · 1985 · 155 citations

Engineering, Thermal Nitridation, Silicon On Insulator +18

Single-wafer integrated semiconductor device processing

Masoud Moslehi, R. A. Chapman, Man Wong et al. · IEEE Transactions on Electron Devices · 1992 · 96 citations

Electrical Engineering, Wafer Scale Processing, Engineering +12

Effect of thermal nitridation processes on boron and phosphorus diffusion in 〈100〉 silicon

P. Fahey, R.W. Dutton, Masoud Moslehi · Applied Physics Letters · 1983 · 82 citations

Materials Science, Materials Engineering, Boron Nitride +14

Compositional Studies of Thermally Nitrided Silicon Dioxide (Nitroxide)

Masoud Moslehi, C. J. Han, Krishna C. Saraswat et al. · Journal of The Electrochemical Society · 1985 · 58 citations

Engineering, Thermal Nitridation, Chemistry +17