Concepedia
Statistics
Publications
20
Citations
929
H-Index
16
Active since
1983
Affiliations
Stanford University(Current)
Texas Instruments (United States)
Stanford SystemX Alliance
Isfahan University of Medical Sciences
Masoud Moslehi is an author at Stanford University specializing in engineering, applied physics, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsElectrical EngineeringThermal EngineeringSemiconductorsChemical EngineeringMaterials Engineering
Publications per year
1983–2018
Thermal nitridation of Si and SiO<sub>2</sub>for VLSI
Masoud Moslehi, Krishna C. Saraswat · IEEE Transactions on Electron Devices · 1985 · 172 citations
Materials Science, Metal-insulator Semiconductor, Chemical Engineering +13
Kinetics of thermal nitridation processes in the study of dopant diffusion mechanisms in silicon
P. Fahey, G.P. Barbuscia, Masoud Moslehi et al. · Applied Physics Letters · 1985 · 155 citations
Engineering, Thermal Nitridation, Silicon On Insulator +18
Single-wafer integrated semiconductor device processing
Masoud Moslehi, R. A. Chapman, Man Wong et al. · IEEE Transactions on Electron Devices · 1992 · 96 citations
Electrical Engineering, Wafer Scale Processing, Engineering +12
Effect of thermal nitridation processes on boron and phosphorus diffusion in 〈100〉 silicon
P. Fahey, R.W. Dutton, Masoud Moslehi · Applied Physics Letters · 1983 · 82 citations
Materials Science, Materials Engineering, Boron Nitride +14
Compositional Studies of Thermally Nitrided Silicon Dioxide (Nitroxide)
Masoud Moslehi, C. J. Han, Krishna C. Saraswat et al. · Journal of The Electrochemical Society · 1985 · 58 citations
Engineering, Thermal Nitridation, Chemistry +17
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