Defect engineering for VLSI epitaxial silicon - Concepedia

Concepedia

Publication | Closed Access

Defect engineering for VLSI epitaxial silicon

27

Citations

11

References

1987

Year

G. A. Rozgonyi, Ali Salih, Z. J. Radzimski, R. R. Kola, J. W. Honeycutt, K.E. Bean, K. Lindberg

Journal of Crystal Growth

EngineeringDefect EngineeringApplied PhysicsVlsiSilicon On InsulatorDefect ToleranceSilicon DebuggingMicroelectronics

References

	Year	Citations

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