Concepedia

S. M. Hu

SM

56

Publications

4.4K

Citations

38

H-Index

1966

Active since

Affiliations

IBM (United States)(Current)

Stanford University

S. M. Hu is an author at IBM (United States) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsCrystalline DefectsSurface ScienceSolid MechanicsMicroelectronicsMechanical EngineeringMicrostructure

Publications per year

1966–1992

56

Publications

56

Stress-related problems in silicon technology

S. M. Hu · Journal of Applied Physics · 1991 · 497 citations

Engineering, Integrated Circuits, Silicon On Insulator +20

Formation of stacking faults and enhanced diffusion in the oxidation of silicon

S. M. Hu · Journal of Applied Physics · 1974 · 434 citations

Engineering, Stacking-fault Embryos, Stacking-fault Growth +16

Film-edge-induced stress in substrates

S. M. Hu · Journal of Applied Physics · 1979 · 225 citations

Engineering, Mechanical Engineering, Mechanics +16

Infrared absorption spectra of SiO2 precipitates of various shapes in silicon: calculated and experimental

S. M. Hu · Journal of Applied Physics · 1980 · 165 citations

Optical Materials, Engineering, Absorption Spectroscopy +23

Defects in silicon substrates

S. M. Hu · Journal of Vacuum Science and Technology · 1977 · 158 citations

Materials Engineering, Materials Science, Swirl Aggregates +13

Rows per page

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