Statistics
Publications
56
Citations
4.5K
H-Index
38
Active since
1966
Affiliations
S. M. Hu is an author at IBM (United States) specializing in materials science, materials engineering, and natural sciences.
Publications per year
1966–1992
56
56
Stress-related problems in silicon technology
S. M. Hu · Journal of Applied Physics · 1991 · 499 citations
Film-edge-induced stress in substrates
S. M. Hu · Journal of Applied Physics · 1979 · 226 citations
Natural Sciences, Materials Engineering, Materials Science +17
S. M. Hu · Journal of Vacuum Science and Technology · 1977 · 159 citations
Natural Sciences, Materials Engineering, Materials Science +17
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