Michael Curt Elwenspoek

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 443 citations · Full text

Engineering, Structural Dynamics, Mechanical Engineering +16

Capillary filling speed of water in nanochannels

Niels R. Tas, Jeroen Haneveld, Henri Jansen et al. · Applied Physics Letters · 2004 · 274 citations · Full text

Engineering, Liquid-liquid Flow, Fluid Mechanics +14

Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures

Meint J. de Boer, Henri Jansen, Edwin Smulders et al. · Journal of Microelectromechanical Systems · 2002 · 261 citations · Full text

Engineering, Cryogenic Temperatures, Parameter Settings +17

Development and applications of very high flux microfiltration membranes

S. Kuiper, C.J.M. van Rijn, W. Nijdam et al. · Journal of Membrane Science · 1998 · 190 citations · Full text

Environmental Engineering, Membrane Technology, Membrane Process

Micromachining of buried micro channels in silicon

Meint J. de Boer, R.W. Tjerkstra, Henri Jansen et al. · Journal of Microelectromechanical Systems · 2000 · 183 citations · Full text

Electrical Engineering, Channel Technology, Engineering +15