Concepedia

Edwin Smulders

ES

Statistics

Publications

3

Citations

468

H-Index

3

Active since

1996

Affiliations

University of Twente(Current)

Edwin Smulders is an author at University of Twente specializing in engineering, semiconductor devices, and microelectronics.

Publications per year

1996–2002

3

Publications

3

Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures

Meint J. de Boer, Henri Jansen, Edwin Smulders et al. · Journal of Microelectromechanical Systems · 2002 · 264 citations · Full text

Engineering, Materials Engineering, Materials Science +17

BSM 7: RIE lag in high aspect ratio trench etching of silicon

Henri Jansen, M. de Boer, Remco J. Wiegerink et al. · Microelectronic Engineering · 1997 · 144 citations · Full text

Engineering, Electrical Engineering, Materials Science +11

High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

G.J. Burger, Edwin Smulders, T.S.J. Lammerink et al. · Sensors and Actuators A Physical · 1996 · 60 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +11

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