Concepedia

High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

G.J. Burger, Edwin Smulders, T.S.J. Lammerink, J.H.J. Fluitman, Shigeru Imai

Sensors and Actuators A Physical · 1996 · 60 citations · 3 references

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3

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

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The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Henri Jansen, M. de Boer, R. Legtenberg · Journal of Micromechanics and Microengineering · 1995 · 593 citations · Full text

, , +17

Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers

Stefan Linder, H. Baltes, F. Gnaedinger et al. · 2002 · 54 citations

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