High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through - Concepedia

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High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

DOI Full Paper Access

60

Citations

3

References

1996

Year

G.J. Burger, Edwin Smulders, T.S.J. Lammerink, J.H.J. Fluitman, Shigeru Imai

Sensors and Actuators A Physical

Electrical EngineeringDeep HolesEngineeringElectron-beam LithographyBeam LithographyHigh-resolution Shadow-mask PatterningApplied PhysicsElectrical Wafer Feed-throughMicroelectronicsNanolithography Method

References

	Year	Citations

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