Publication | Open Access
BSM 7: RIE lag in high aspect ratio trench etching of silicon
143
Citations
10
References
1997
Year
Materials EngineeringEngineeringPhysicsNanoelectronicsBias Temperature InstabilityApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma EtchingRie LagSilicon Debugging
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