M. Elwenspoek

The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Henri Jansen, M. de Boer, R. Legtenberg et al. · Journal of Micromechanics and Microengineering · 1995 · 587 citations

Comb-drive actuators for large displacements

R. Legtenberg, A.W. Groeneveld, M. Elwenspoek · Journal of Micromechanics and Microengineering · 1996 · 576 citations

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 542 citations

Engineering, Mechanical Engineering, Large Adhesion Forces +16

A survey on the reactive ion etching of silicon in microtechnology

Henri Jansen, Han Gardeniers, M. de Boer et al. · Journal of Micromechanics and Microengineering · 1996 · 464 citations · Full text

Engineering, Mechanical Engineering, Reactive Ion Etching +18

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol, H.T.G. van Lintel, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1990 · 279 citations · Full text

Engineering, Soft Robotics, Micromachines +8