F.C.M. van de Pol

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 616 citations

Electrical Engineering, Engineering, Micromachines +9

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol, H.T.G. van Lintel, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1990 · 279 citations · Full text

Engineering, Soft Robotics, Micromachines +8

R.f. planar magnetron sputtered ZnO films I: Structural properties

F.C.M. van de Pol, F.R. Blom, Th.J.A. Popma · Thin Solid Films · 1991 · 135 citations · Full text

Materials Engineering, Magnetism, Materials Science +6

R.F. planar magnetron sputtered ZnO films II: Electrical properties

F.R. Blom, F.C.M. van de Pol, G.J. Bauhuis et al. · Thin Solid Films · 1991 · 68 citations · Full text

Materials Science, Magnetism, Planar Magnetron +5

A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

F.C.M. van de Pol, D.G.J. Wonnink, Michael Curt Elwenspoek et al. · Sensors and Actuators · 1989 · 65 citations

Engineering, Micromachines, Other Micromechanical Devices +12