A piezoelectric micropump based on micromachining of silicon - Concepedia

Concepedia

Publication | Closed Access

A piezoelectric micropump based on micromachining of silicon

616

Citations

4

References

1988

Year

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra

Sensors and Actuators

Electrical EngineeringEngineeringMicromachinesMicrofabricationMechanical EngineeringMechatronicsMicromachined Ultrasonic TransducerPiezoelectric MicropumpMicroactuatorMicromachiningMicroelectronicsMicrofluidics

References

	Year	Citations

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