Electrostatically driven vacuum-encapsulated polysilicon resonators - Concepedia

Concepedia

Publication | Open Access

Electrostatically driven vacuum-encapsulated polysilicon resonators

DOI Full Paper Access

408

Citations

17

References

1994

Year

H.A.C. Tilmans, R. Legtenberg

Sensors and Actuators A Physical

Vacuum-encapsulated Polysilicon ResonatorsElectrical EngineeringEngineeringMicrofabricationApplied PhysicsNano Electro Mechanical SystemMicro-electromechanical System

References

	Year	Citations

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