Concepedia

Electrostatic Resonators

Electrostatic Resonator is a type of MEMS resonator that operates on the principle of electrostatic transduction, wherein mechanical vibration is initiated and sustained through Coulomb forces generated by applied electric fields, distinguishing it from other MEMS resonators that may rely on piezoelectric or electromagnetic actuation mechanisms.

147

Publications

6K

Citations

392

Authors

162

Institutions

Publications per year

2017–2026

30

Variants

Electrostatic Resonator

Parents

Publications

147

Electrostatic-comb drive of lateral polysilicon resonators

William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy et al. · Sensors and Actuators A Physical · 1990 · 454 citations

, , +9

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 409 citations · Full text

, , +12

Nonlinear behaviour of electrically actuated MEMS resonators

Mergen H. Ghayesh, Hamed Farokhi, Marco Amabili · International Journal of Engineering Science · 2013 · 265 citations

, , +14

Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication

R. Legtenberg, H.A.C. Tilmans · Sensors and Actuators A Physical · 1994 · 216 citations · Full text

, , +12

The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation

Jeffrey F. Rhoads, Steven W. Shaw, Kimberly L. Turner · Journal of Micromechanics and Microengineering · 2006 · 173 citations

, , +17

1–5 of 147

Authors

392

  1. MI
    Mohammad I. Younis

    King Abdullah University of Science and Technology, Saudi Arabia

    12 publications · 585 citations

    11

    h-index

  2. HM
    Hassen M. Ouakad

    Sultan Qaboos University, Oman

    7 publications · 306 citations

    7

    h-index

  3. RT
    Roger T. Howe

    University of California, Berkeley, United States

    7 publications · 691 citations

    7

    h-index

  4. DE
    David Elata

    Technion – Israel Institute of Technology, Israel

    6 publications · 101 citations

    6

    h-index

  5. HT
    H.A.C. Tilmans

    IMEC, Belgium

    5 publications · 780 citations

    5

    h-index

1–5 of 392

Institutions

162

  1. Binghamton University

    Binghamton, United States

    10 h-index

    24 publications

    1.3K citations

  2. King Abdullah University of Science and Technology

    Jeddah, Saudi Arabia

    7 h-index

    21 publications

    605 citations

  3. Stanford University

    Stanford, United States

    7 h-index

    38 publications

    809 citations

  4. Centre National de la Recherche Scientifique

    Paris, France

    6 h-index

    24 publications

    567 citations

  5. University of Cambridge

    Cambridge, United Kingdom

    5 h-index

    17 publications

    1K citations

  6. Technion – Israel Institute of Technology

    Haifa, Israel

    5 h-index

    9 publications

    159 citations

  7. Shanghai Jiao Tong University

    Shanghai, China

    5 h-index

    15 publications

    370 citations

  8. Zhejiang University

    Hangzhou, China

    5 h-index

    15 publications

    319 citations

1–8 of 162

Venues

  1. Sensors and Actuators A Physical

    17 publications · 1.7K citations

    16

    h-index

  2. Journal of Microelectromechanical Systems

    17 publications · 769 citations

    15

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 12 publications · 679 citations

    12

    h-index

  4. International Journal of Non-Linear Mechanics

    7 publications · 221 citations

    6

    h-index

  5. Nonlinear Dynamics

    6 publications · 177 citations

    6

    h-index

1–5