The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation

Abstract

Electrostatically-actuated resonant microbeam devices have garnered significant attention due to their geometric simplicity and broad applicability. Recently, some of this focus has turned to comb-driven microresonators with purely-parametric excitation, as such systems not only exhibit the inherent benefits of MEMS devices, but also a general improvement in sensitivity, stopband attenuation and noise rejection. This work attempts to combine each of these areas by proposing a microbeam device which couples the inherent benefits of a resonator with purely-parametric excitation with the simple geometry of a microbeam. Theoretical analysis reveals that the proposed device exhibits desirable response characteristics, but also quite complex dynamics. Of particular note is the fact that the device's nonlinear frequency response is found to be qualitatively dependent on the system's ac excitation amplitude. While this flexibility can be desirable in certain contexts, it introduces additional design and operating limitations. While the principal focus of this work is the proposed system's nonlinear response, the work also contains details pertaining to model development and device design.