Michael W. Judy

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Publications

Citations

1.5K

H-Index

Active since

1990

Affiliations

Analog Devices (United States)(Current)

University of California, Berkeley

Massachusetts Institute of Technology

Sensors (United States)

Michael W. Judy is an author at Analog Devices (United States) specializing in engineering, microelectromechanical systems, and mechanical engineering.

Publications per year

1990–2024

Publications

Electrostatic-comb drive of lateral polysilicon resonators

William C. Tang, Tu-Cuong H. Nguyen, Michael W. Judy et al. · Sensors and Actuators A Physical · 1990 · 454 citations

Engineering, Electrical Engineering, Materials Science +9

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations

CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers

Stefon E. Shelton, Mei-Lin Chan, Hyunkyu Park et al. · 2009 · 132 citations

Natural Sciences, Electrical Engineering, Materials Science +15

Accurate Assessment of Packaging Stress Effects on MEMS Sensors by Measurement and Sensor–Package Interaction Simulations

Xin Zhang, Seungbae Park, Michael W. Judy · Journal of Microelectromechanical Systems · 2007 · 82 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Integrated sensor and electronics processing for &lt;10?8 "iMEMS" inertial measurement unit components

S. Lewis, Sameer Gul Alie, Tim Brosnihan et al. · 2004 · 66 citations

Engineering, Electrical Engineering, Materials Science +14

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