Tim Brosnihan

A MEMS Condenser Microphone for Consumer Applications

J.W. Weigold, Tim Brosnihan, Joe Bergeron et al. · 2006 · 127 citations

Engineering, Microfabrication, Acoustic Characterization +11

Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments

Tim Brosnihan, J.M. Bustillo, Albert P. Pisano et al. · 2002 · 77 citations

Engineering, Electrical Isolation, Device Integration +16

Integrated sensor and electronics processing for <10?8 "iMEMS" inertial measurement unit components

S. Lewis, Sameer Gul Alie, Tim Brosnihan et al. · 2004 · 65 citations

Artificial Skins, Engineering, Measurement +24

A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS

J. Yasaitis, Michael W. Judy, Tim Brosnihan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 37 citations

Engineering, Device Integration, Mechanical Engineering +20

Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics

Tim Brosnihan, Stephanie Brown, A. Brogan et al. · 2004 · 31 citations

Optical Materials, Engineering, Device Integration +20