J.W. Weigold

A MEMS Condenser Microphone for Consumer Applications

J.W. Weigold, Tim Brosnihan, Joe Bergeron et al. · 2006 · 127 citations

Engineering, Microfabrication, Acoustic Characterization +11

Comparison of Cl2 and F-based dry etching for high aspect ratio Si microstructures etched with an inductively coupled plasma source

Weiqian Tian, J.W. Weigold, S. W. Pang · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 61 citations

Engineering, Cl2 Chemistry, Silicon On Insulator +16

3D structures with piezoresistive sensors in standard CMOS

Eric Hoffman, Brett Warneke, E. Kruglick et al. · 2005 · 46 citations

Engineering, Standard Cmos, Mechanical Engineering +16

Design and fabrication of submicrometer, single crystal Si accelerometer

J.W. Weigold, K. Najafi, S. W. Pang · Journal of Microelectromechanical Systems · 2001 · 42 citations

Sensitive Accelerometer, Engineering, Accelerometer Sensitivity +14

The next generation intigrated MEMS and CMOS process on SOI wafers for overdamped accelerometers

T.D. Chen, T.W. Kelly, D. Collins et al. · 2005 · 29 citations

Mems Structural Release, Electrical Engineering, Next Generation +14