Concepedia

Polysilicon

Polysilicon is a microfabrication material belonging to the class of polycrystalline semiconductor thin films, distinguished by its structural composition of multiple crystalline silicon grains and its widespread use as a mechanically robust and electrically tunable structural layer in MEMS devices.

2.9K

Publications

121.6K

Citations

8.3K

Authors

1.1K

Institutions

Publications per year

2017–2026

198

Parents

Publications

2.9K

Design of ion-implanted MOSFET's with very small physical dimensions

R.H. Dennard, F.H. Gaensslen, Hwa-Nien Yu et al. · IEEE Journal of Solid-State Circuits · 1974 · 3.5K citations

, , +16

The electrical properties of polycrystalline silicon films

John Y. W. Seto · Journal of Applied Physics · 1975 · 2.9K citations

, , +17

Quantum Mechanical Actuation of Microelectromechanical Systems by the Casimir Force

H. B. Chan, Vladimir Aksyuk, R. N. Kleiman et al. · Science · 2001 · 875 citations

, , +14

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 737 citations

, , +6

Quality factors in micron- and submicron-thick cantilevers

Kevin Yasumura, T. D. Stowe, Eugene M. Chow et al. · Journal of Microelectromechanical Systems · 2000 · 678 citations

, , +15

1–5 of 2.9K

Authors

8.3K

  1. RT
    Roger T. Howe

    University of California, Berkeley, United States

    56 publications · 5.9K citations

    35

    h-index

  2. RM
    R.S. Muller

    University of California, Berkeley, United States

    27 publications · 2.6K citations

    22

    h-index

  3. MM
    Mehran Mehregany

    Case Western Reserve University, United States

    23 publications · 1.1K citations

    18

    h-index

  4. GF
    G. Fortunato

    Institute for Microelectronics and Microsystems, Italy

    25 publications · 1.1K citations

    18

    h-index

  5. AP
    Albert P. Pisano

    University of California, Berkeley, United States

    21 publications · 1.7K citations

    18

    h-index

1–5 of 8.3K

Institutions

1.1K

  1. University of California, Berkeley

    Berkeley, United States

    59 h-index

    440 publications

    29.9K citations

  2. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    35 h-index

    278 publications

    14.1K citations

  3. Stanford University

    Stanford, United States

    34 h-index

    291 publications

    16.4K citations

  4. University of Michigan

    Ann Arbor, United States

    32 h-index

    149 publications

    10.3K citations

  5. Massachusetts Institute of Technology

    Cambridge, United States

    32 h-index

    169 publications

    10K citations

  6. Texas Instruments (United States)

    Dallas, United States

    28 h-index

    230 publications

    9.8K citations

  7. University of California, Los Angeles

    Los Angeles, United States

    26 h-index

    85 publications

    4.1K citations

  8. Case Western Reserve University

    Cleveland, United States

    25 h-index

    131 publications

    6.4K citations

1–8 of 1.1K

Venues

  1. IEEE Transactions on Electron Devices

    330 publications · 15.8K citations

    64

    h-index

  2. Journal of Microelectromechanical Systems

    122 publications · 11.7K citations

    58

    h-index

  3. IEEE Electron Device Letters

    222 publications · 7.1K citations

    43

    h-index

  4. Sensors and Actuators A Physical

    85 publications · 5.7K citations

    41

    h-index

  5. Journal of The Electrochemical Society

    JES · 143 publications · 4.6K citations

    37

    h-index

1–5