Laterally Driven Polysilicon Resonant Microstructures

The resonant gate transistor

H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations

Engineering, Electrical Engineering, Microelectronics +11

Young’s modulus measurements of thin films using micromechanics

K. Petersen, C. R. Guarnieri · Journal of Applied Physics · 1979 · 296 citations

Natural Sciences, Materials Engineering, Materials Science +11

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +17

Resonant-microbridge vapor sensor

Roger T. Howe, R.S. Muller · IEEE Transactions on Electron Devices · 1986 · 223 citations

Engineering, Electrical Engineering, Materials Science +16

Resonator sensors-a review

Robert M. Langdon · Journal of Physics E Scientific Instruments · 1985 · 215 citations

Engineering, Materials Engineering, Materials Science +17