Mehran Mehregany

Nanodevice motion at microwave frequencies

Xue Huang, Christian A. Zorman, Mehran Mehregany et al. · Nature · 2003 · 583 citations · Full text

Engineering, Physics, Nanotechnology +6

Silicon carbide MEMS for harsh environments

Mehran Mehregany, Christian A. Zorman, N. Rajan et al. · Proceedings of the IEEE · 1998 · 457 citations

Materials Science, Materials Engineering, Electrical Engineering +15

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman · Thin Solid Films · 1999 · 317 citations

Electrical Engineering, Engineering, Microfabrication +9

Monocrystalline silicon carbide nanoelectromechanical systems

Ya‐Tang Yang, K. L. Ekinci, Xuefei Huang et al. · Applied Physics Letters · 2001 · 284 citations · Full text

Engineering, Wafer Scale Processing, Nanoengineering +17

Microfabricated structures for the <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> measurement of residual stress, Young’s modulus, and ultimate strain of thin films

Mark G. Allen, Mehran Mehregany, Roger T. Howe et al. · Applied Physics Letters · 1987 · 253 citations

Membrane Structure, Ultimate Strain, Engineering +19