Concepedia

Eugene M. Chow

EM

23

Publications

1.5K

Citations

16

H-Index

1984

Active since

Affiliations

Palo Alto Research Center(Current)

Stanford University

Oracle (United States)

Eugene M. Chow is an author at Palo Alto Research Center specializing in engineering, microfabrication, and electronic packaging.

Top concepts

EngineeringMicrofabricationMicroelectronicsElectronic PackagingElectrical EngineeringApplied PhysicsMicrofluidicsMechanical EngineeringIntegrated CircuitsBiomedical Engineering

Publications per year

1984–2019

23

Publications

23

Quality factors in micron- and submicron-thick cantilevers

Kevin Yasumura, T. D. Stowe, Eugene M. Chow et al. · Journal of Microelectromechanical Systems · 2000 · 669 citations

Quality Factors, Engineering, Micromechanics +16

A high-performance planar piezoresistive accelerometer

Aaron Partridge, J. K. Reynolds, Benjamin W. Chui et al. · Journal of Microelectromechanical Systems · 2000 · 196 citations

Piezoresistive Accelerometers, Micromachined Piezoresistive Accelerometer, Engineering +21

Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates

Eugene M. Chow, V. Chandrasekaran, Aaron Partridge et al. · Journal of Microelectromechanical Systems · 2002 · 88 citations

Advanced Packaging, 3D Ic Architecture, Electrical Engineering +15

An efficient electrical addressing method using through-wafer vias for two-dimensional ultrasonic arrays

Ching‐Hsiang Cheng, Eugene M. Chow, Xuecheng Jin et al. · 2002 · 61 citations

Aeroacoustics, Signal Processing Chip, Engineering +17

Activity of circular muscle of rat uterus at different times in pregnancy

Bengt Bengtsson, Eugene M. Chow, Jean M. Marshall · American Journal of Physiology-Cell Physiology · 1984 · 59 citations

Rows per page

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