Concepedia

C.R. Rutigliano

CR

Statistics

Publications

3

Citations

253

H-Index

3

Active since

1986

Affiliations

University of Wisconsin System(Current)

C.R. Rutigliano is an author at University of Wisconsin System specializing in applied physics, thin films, and materials science.

Top concepts

Publications per year

1986–2003

3

Publications

3

Diagnostic microstructures for the measurement of intrinsic strain in thin films

H. Guckel, D.W. Burns, C.R. Rutigliano et al. · Journal of Micromechanics and Microengineering · 1992 · 150 citations

, , +16

Mechanical properties of fine grained polysilicon-the repeatability issue

H. Guckel, D.W. Burns, H.A.C. Tilmans et al. · 2003 · 93 citations

, , +16

DEPOSITION TECHNIQUES AND PROPERTIES OF STRAIN COMPENSATED LPCVD SILICON NITRIDE FILMS

H. Guckel, D.K. Showers, D.W. Burns et al. · 1986 · 10 citations · Full text

, , +7

1–3 of 3