Concepedia

Fine-grained polysilicon films with built-in tensile strain

H. Guckel, D.W. Burns, C.C.G. Visser, H.A.C. Tilmans, D. Deroo

IEEE Transactions on Electron Devices · 1988 · 158 citations · 4 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsSemiconductor DevicesThin FilmsNanomechanicsStrain AnalysisStrain EngineeringStress-strain BehaviorThin Film Mechanical PropertiesThin Film StrainFilm StrainMechanical Properties Of FilmsPolysiliconStress Engineering In Thin FilmsStress MeasurementTensile StrainThin Film Mechanics

Abstract

Novel processing conditions and strain diagnostic structures are used to demonstrate that polysilicon films with built-in tensile-strain can be achieved and that any physical size limitations due to compressive-buckling in polysilicon micromechanical structures can be eliminated.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>

References

4

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +17

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Engineering, Materials Science, Mechanical Engineering +17

Planar processed polysilicon sealed cavities for pressure transducer arrays

H. Guckel, D.W. Burns · 1984 · 72 citations

Engineering, Electrical Engineering, Materials Engineering +11

Polycrystalline silicon-based sensors

Ernst Lüder · Sensors and Actuators · 1986 · 45 citations