Planar processed polysilicon sealed cavities for pressure transducer arrays

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Engineering, Materials Science, Mechanical Engineering +17

Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films

T. I. Kamins, Mohammad M. Mandurah, Krishna C. Saraswat · Journal of The Electrochemical Society · 1978 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +17

Stress in polycrystalline and amorphous silicon thin films

Roger T. Howe, R.S. Muller · Journal of Applied Physics · 1983 · 111 citations

Natural Sciences, Materials Engineering, Materials Science +17

Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties

Roger T. Howe, R.S. Muller · Sensors and Actuators · 1983 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +14