Polysilicon Processing

Polysilicon Processing is a materials fabrication method in microelectromechanical systems (MEMS) that involves the deposition, patterning, and doping of polycrystalline silicon to form structural and conductive components in integrated microdevices.

198

Publications

7.5K

Citations

660

Authors

181

Institutions

Publications per year

2017–2026

Parents

Mems Fabrication

Publications

198

Polysilicon TFT technology for active matrix OLED displays

Mark J. Stewart, Robert S. Howell, Luis Miguel Rego Pires et al. · IEEE Transactions on Electron Devices · 2001 · 323 citations

Engineering, Electrical Engineering, Materials Science +16

Surface micromachining for microsensors and microactuators

Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 255 citations

Engineering, Materials Engineering, Materials Science +17

IC-Compatible Polysilicon Surface Micromachining

J.J. Sniegowski, Maarten P. Boer · Annual Review of Materials Science · 2000 · 254 citations

Engineering, Electrical Engineering, Materials Science +17

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Jiwang Yan, Masahiko Yoshino, T Kuriagawa et al. · Materials Science and Engineering A · 2001 · 162 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16

Role of etch products in polysilicon etching in a high-density chlorine discharge

C. Lee, David B. Graves, M. A. Lieberman · Plasma Chemistry and Plasma Processing · 1996 · 160 citations

Natural Sciences, Materials Engineering, Materials Science +13

1–5 of 198

Authors

660

RT
Roger T. Howe
University of California, Berkeley, United States
7 publications · 570 citations
7
h-index
JS
J.J. Sniegowski
Sandia National Laboratories, United States
5 publications · 383 citations
5
h-index
TW
Tiefeng Wang
Tsinghua University, China
5 publications · 100 citations
5
h-index
PL
Peilong Li
University of Chinese Academy of Sciences, China
4 publications · 88 citations
4
h-index
JB
J. B. Boyce
Palo Alto Research Center, United States
4 publications · 98 citations
4
h-index

1–5 of 660

Institutions

181

1–8 of 181

Venues

Sensors and Actuators A Physical
16 publications · 759 citations
14
h-index
Journal of The Electrochemical Society
JES · 15 publications · 362 citations
12
h-index
IEEE Transactions on Electron Devices
10 publications · 651 citations
10
h-index
Journal of Crystal Growth
9 publications · 233 citations
9
h-index
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
6 publications · 129 citations
6
h-index

1–5