On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

The correlation of indentation experiments

K. L. Johnson · Journal of the Mechanics and Physics of Solids · 1970 · 1.4K citations

Dentistry, Data Science, Experimental Design +4

Hardness measurement at penetration depths as small as 20 nm

J. B. Pethicai, R. Hutchings, W. C. Oliver · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1983 · 924 citations

Natural Sciences, Materials Engineering, Materials Science +17

Amorphization and Conductivity of Silicon and Germanium Induced by Indentation

David R. Clarke, Markus Kroll, P. D. Kirchner et al. · Physical Review Letters · 1988 · 412 citations

Natural Sciences, Materials Engineering, Materials Science +17

Phase transformations of silicon caused by contact loading

Andreas Kailer, Yury Gogotsi, Klaus G. Nickel · Journal of Applied Physics · 1997 · 371 citations

Natural Sciences, Materials Engineering, Materials Science +17

Technological Advances in Fine Abrasive Processes

R. Komanduri, D.A. Lucca, Yukako Tani · CIRP Annals · 1997 · 310 citations

Engineering, Materials Engineering, Materials Science +14