On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications - Concepedia

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On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

162

Citations

13

References

2001

Year

Jiwang Yan, Masahiko Yoshino, T Kuriagawa, Takahiro SHIRAKASHI, K. SYOJI, R. Komanduri

Materials Science and Engineering A

Ductile MachiningEngineeringMicrofabricationMechanical EngineeringFabrication TechniqueMicro Electro-mechanical SystemsMicro-optical ComponentMicro-electromechanical SystemMicroelectronicsOptical ApplicationsMicrostructure

References

	Year	Citations

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